SemiConductor Wafer Bonding

SemiConductor Wafer Bonding

Science and Technology

Tong, Q.-Y.; Goesele, U.

John Wiley & Sons Inc

12/1998

320

Dura

Inglês

9780471574811

15 a 20 dias

654

Descrição não disponível.
Basics of Interactions Between Flat Surfaces.

Influence of Particles, Surface Steps, and Cavities.

Surface Preparation and Room-Temperature Wafer Bonding.

Thermal Treatment of Bonded Wafer Pairs.

Thinning Procedures.

Electrical Properties of Bonding Interfaces.

Stresses in Bonded Wafers.

Bonding of Dissimilar Materials.

Bonding of Structured Wafers.

Mainstream Applications.

Emerging and Future Applications.

Index.
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